INTRODUCTION TO GAS AGGREGATION SOURCES History Principles of Gas Aggregation Types of Gas Aggregation Sources RECENT MODIFICATIONS OF GAS AGGREGATION SOURCES Multi-Element Approach Hollow Cylindrical Magnetron High Flux DC Magnetron Sputtering High Flux Metal Vapor Cell High-Power Microwave Plasma Source Room Temperature Aggregation HIPIMS Pulsed Gas Aggregation High Pressure and Reactive Gas Magnetron Sputtering POST-GROWTH MANIPULATION OF NANOPARTICLES Coating Annealing Deflection and Mass Filtering Control Landing Energy In Flight Analysis PERSPECTIVES Skryť popis